Olympus CIX100 Handbuch zur Systemeinrichtung - Seite 31
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Focusing
Focusing unit:
system
Fine focus knob: Distance moved per rotation 0.1 mm
Coarse focus knob: Distance moved per rotation 17.8 mm
Equipped with tension adjustment mechanism and upper limit stopper
mechanism
Motorized
MFD-2
focus drive
Stage
Scan 130 x 85
OLYMPUS Cleanliness Inspector CIX100
Resolution
typical 0.002 μm,
depends on the speed reduction
gear ratio
of the microscope's focus drive
Motor
2-phase stepper motor
Max. revolutions
60 rev. / s
Material
aluminium
Surface
anodic coating, black lacquered
Travel range
Travel speed
Repeatability
Accuracy
Resolution
Orthogonality
Motor
Limit switches
Material / surface
31
13 Specifications
max. 130 mm × 85 mm
max. 120 mm/s (with
2 mm ball screw pitch)
max. 240 mm/s (with
4 mm ball screw pitch)
< 1 μm (bi-directional)
±3 μm
0.01 μm (smallest step
size)
< 10 arcsec
2-phase stepper motor
continuously adjustable
optical light beams
aluminium / anodic
coating, black lacquered
System Setup Guide