Olympus MX61L Manual de montaje - Página 13

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Olympus MX61L Manual de montaje
MX61/MX61L

Stage and Holder System for the MX61L

Rotary Wafer Holder for 8-inch
6-Inch Mask Holder
Glass Plate
and 12-inch wafers
MX-MH6
MX-SPG1412
MX-WHPR128
14x12-Inch Stage
MX-SIC1412R2
10