Olympus MX61L Manual de montaje - Página 16
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Fig. 7
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Fig. 8
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Fig. 9
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Attaching the Holders
# Attach a holder in the direction so that the notch on the holder's
side faces left. The adjustment of the levelness is performed in this
direction.
Attaching the Wafer Holder (Fig. 7)
1. Insert the wafer holder plate @ into the stage, one edge first.
2. Push the wafer holder plate from above to make sure that it sits correctly
with no tilt.
3. Using a flat-blade precision screwdriver, clamp the plate by tightening
the holder clamping screw ² on the left side of the stage.
# The levelness of the holder is adjusted by the heights of the three
screws on the back side of the stage. Do not push positions near
the holder, for this may tilt the holder.
Attaching the Mask Holder (Fig. 8)
1. Carefully place the mask holder ³ on the stage surface, making sure
that it sits correctly with no tilt.
2. Using the precision screwdriver, clamp the plate by tightening the holder
clamping screw | on the left side of the stage.
Attaching the Black Plate/Glass Plate
Carefully place the plate on the stage surface, and tighten the holder
clamping screw on the left side of the stage.
# When attaching the glass plate, do not tighten the clamping screw
excessively as the glass plate may break. Tighten to the extent that
the glass plate does not rattle noticeably when attached.
Adjusting the Levelness of Holder Plate (Fig. 9)
The levelness of the stage travel (movement) and the top surface of the
wafer holder have been adjusted at the factory. If finer adjustment is
required or when using a holder from a manufacturer other than Olympus,
apply drops of alcohol on screws @ to loosen the screw lock, then
adjust the heights of the screws by inserting a flat-bladed screwdriver
from below.
# The maximum loads of the stages including the holders are as
follows.
MX-SIC8R/MX-SIC6R2/MX-SIC6A : 2 kg (4.4 lbs.)
MX-SIC1412R2
(Figs. 7 & 8)
: 3.5 kg (7.7 lbs)