Nikon Eclipse L200A Folleto y especificaciones - Página 3
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Easy configuration into an automated inspection system
Programmed settings
As an inspection process varies depending on substrate,
layer, and even the operator, it has been necessary to re-
adjust settings for each inspection process.
The L200A's programming feature eliminates this process.
You just select the settings-such as observation method,
objective magnification, point to be checked, focus
position, aperture, and light intensity-and save them by
attaching appropriate file names. All you need do to begin
your inspection is just to specify the file name.
DART software (option)
DART Software is an integrated software package
that can fully automate the inspection process.
DART combined with an NWL860 wafer loader,
ISS200 Motorized Stage and a L200A Auto Focus
offers a complete automated wafer inspection
station. DART software modules allow further
upgrades with options such as image archiving,
defect review, post probe review and online
communications.
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Communication System Diagram
AF
DIC
Confocal
DUV
Local
RS232C (Binary)
Local
Local
L200A
Local
RS232C
(Binary)
Scanning
Other Euipment
stage
(ISS)
PC
RS232C (Binary)
Local
(DART Software)
(Other Software)
RS232C (SECS)
Wafer
Loader
NWL860
Host
Filing
Auto In-
Computer
System
spection
Machine
In combination with
wafer loaders
Of course, the L200A can be configured with
Nikon's NWL-860 series of wafer loaders and
manual or motorized scanning stages to
create a wafer inspection system at a
minimum cost.
L200A configured with NWL-860 INX
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