DISCO DAD321 Manual de mantenimiento - Página 12

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C. MACHINE COMPONENTS

AND FUNCTIONS............................................ C-1

1. Machine Outer Cover ...........................................................................C-2

2. Axis Section .........................................................................................C-5

2-1. Axis Arrangement .......................................................................................... C-6

2-2. X-axis Section................................................................................................ C-7

2-3. Y-axis Section ................................................................................................ C-9

2-4. Z-axis Section.............................................................................................. C-11

2-5. θ-axis Section .............................................................................................. C-13

2-6. Microscope Section ..................................................................................... C-16

2-7. Spindle-axis Section .................................................................................... C-17

3. Main Body Section .............................................................................C-21

4. Detection Function .............................................................................C-25

4-1. Personnel Protection ................................................................................... C-26

4-1-1. Safety switch/lock cylinder of the splash cover .................................. C-27

4-2. Machine Protection ...................................................................................... C-28

4-2-1. Air pressure sensor ............................................................................ C-29

4-2-2. Flow rate sensor [Optional accessory] ............................................... C-30

D. ADJUSTMENT OPERATION........................... D-1

1. Chuck Table Replacement....................................................................D-2

1-1. Chuck Table Classification ............................................................................... D-3

1-2. Chuck Table Replacement ............................................................................... D-6

1-2-1. Precautions for replacing the old type chuck table ............................... D-7

1-2-2. Chuck table replacement procedure .................................................. D-12

1-2-2-1. Removing the chuck table ..................................................................................D-14

1-2-2-2. Mounting the chuck table....................................................................................D-16

1-3. Changeover to the New Type Chuck Table .................................................... D-18

2. Flange/Wheel Mount Replacement ....................................................D-19

2-1. Flange Replacement.................................................................................... D-20

2-1-1. Removing the flange .......................................................................... D-22

CONTENTS

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