Advanced Energy Industries RFX 600 Manuel de l'utilisateur - Page 17
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process to the dc bias regulation. with one of these
generators, maximum power will also equate with maximum dc
bias. By normalizing for the maximum dc bias, the process
will have the widest range of available dc biases.
If resolution of the dc bias control is more important, set
your system up for a "typical" process before you measure dc
bias. The new microprocessor- controlled generators will
calibrate the dc bias over a smaller power cross section,
thus providing a higher resolution over a smaller area of
operation.
since what is best for one application will not necessarily
be best for another application, you may calibrate for either
resolution or range, and then later repeat the process for
the other possibility.
Dc BIAS REGULATION
The RFX 600 has the capability to regulate dc bias at the
chamber.
If you are using a tuner other than the ATX 600,
you must provide a scaled and filtered dc bias feedback
signal from the chamber to the RFX 600.
To scale the dc bias voltage a 200:1 voltage divider should
be configured using a 2 megohm and a 10 kilohm high voltage
resistor such as the Dale type "HVX3/4".
To filter the scaled dc bias feedback, a dual stage R/C
filter should be configured with 1 kilohm
resistors and 1000
picofarad capacitors.
See Figure 1 for divider/filter
configuration.
The feedback network is designed to scale 1000 volts dc
chamber bias to a 5 volt dc feedback signal.
The front panel
left monitor will display chamber dc bias voltage directly.
The maximum display digits is 1000 volts dc.
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