EPFL Accuplate Manuel de l'utilisateur

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Accuplate User Manual

Version of 2020-08-04.

1. Introduction

This user manual explains how to operate the

Accuplate hotplate for baking steps of SU-8 films.

2. Login

• Login on "Z01 Accu - Plate" with CAE on zone

01 accounting computer.

3. Operation

• Place your wafers on the aluminium foil of the

hotplate (maximum 9 wafers in a batch).

• The hotplate is controlled with a Präzitherm PR

5 SR controlled located under the equipment.

• Make sure the controller is turned on. If not,

turn it on.

• The Accuplate can operate in two modes:

Fixed temperature mode = "Regler"



Ramped temperature mode = "Rampenreg.



Programmer", preferred for SU-8 bake

steps.

WARNING: Maximum hotplate temperature is

350°C.

• Select the preferred operating mode using the

appropriate switch.

EPFL Swiss Institute of Technology Lausanne

CMi

Center of MicroNanoTechnology

1) "Regler" mode:

To adjust the temperature in this mode,

maintain the "blue" button pressed and adjust

the temperature set-point with the "up" and

"down" arrows. Wait until the temperature is

stable.

2) "Programmer" mode:

• In "Programmer" mode, users can edit three

programs. Press "P1", "P2" or "P3" to select

these programs.

• Each program can hold a maximum of 5 steps

(ramp time + wait time each).

• Edit each steps of the program by maintaining

the corresponding buttons and adjusting with

the arrows.

Note: SU-8 bake profiles are found in the SU-8

runcard.

• Temperature ramps will be linear up to the

temperature set-point.

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