Olympus MX61 Manuale di montaggio - Pagina 12
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Stage and Holder System for the MX61
Rotary Wafer Holder
BH2-WHR43 (For 3-4 inch wafers)
BH2-WHR54 (For 4-5 inch wafers)
BH2-WHR65 (For 5-6 inch wafers)
Rotary Wafer Holder Plate
BH3-WHP6
6x6-Inch Stage
MX-SIC6A
6x6-Inch Stage
MX-SIC6R2
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Rotary Wafer Holder Plate
MX-WHPR86 (For 6-8 inch wafers)
5-Inch Mask Holder
BH3-MH5
4-Inch Mask Holder
BH3-MH4
Black Plate
BH3-SP6
Glass Plate
BH3-SPG6
8x8-Inch Stage
MX-SIC8R