Olympus MX61A Manuale - Pagina 14

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14x12-Inch Stage and Holder System

Rotary Wafer Holder for 8-inch

6-Inch Mask Holder

Glass Plate

and 12-inch wafers

MX-MH6

MX-SPG1412

MX-WHPR128

14x12-Inch Stage

MX-SIC1412R2