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7.
Perpendicularity
adjustment
of stage
7-l.
Adjustment
of X (horizontal)
direction
7-l-l.
Screw jig (SKN0004)
into the nosepiece.
7-1 -2. Rotate
the
jig
(SKN0004)
to
bring
it
parallel to X-direction.
Bring stage upwards
until
bottom
surface of jig contacts
stage
surface.
7-l-3. Check
for
equal
clearance
between
the
jig and stage surface
with
the thickness
gauge (OT0317)
at the left or right end.
Maximum
telerance
between
stage surface
and jig surface = 0.15 mm.
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