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1-5 Gas is not fed. (Electric-pneumatic ratio valve and solenoid valve check)

Electric-pneumatic ratio

valve and solenoid valve

check

Set the check mode 1.

Press the flow rate UP switch.

Is gas supplied?

End

1. Start up while pressing the flow rate UP switch.

2. Select the gas feed mode "Low".

3. Press the reset switch and set the pressure

reducing value to 80.

Does the LED (DS1

and DS2) on the

UPUH15 light?

Disconnect the tube

from the manifold

inlet.

Press the flow rate

UP switch.

Is gas supplied?

Measure the voltage at TP20.

Defective solenoid valve

Replace the manifold U.

Defective UPUH15U

Replace the UPUH15U.

2-6

TROUBLESHOOTING

Defective UPUH15U

Replace the UPUH15U.

0 V?

Defective electric-

pneumatic ratio valve

Replace the electric-

pneumatic ratio valve.