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DISCO DAD361 データ・メンテナンス・マニュアル
Axis Arrangement Diagram [341/381]
The diagram and the table below show axis arrangement, names and functions
of each axis.
X-axis
Y-axis
Z-axis
θ-axis
Electrical System
Section
Spindle Shaft
Section
Main Body Frame
Main body frame
Name
Z-axis
Y-axis
Moves the chuck table to the right and the left.
Moves the spindle shaft and the microscope forward
and backward.
Moves the spindle up and down.
Rotates the chuck table.
Controls machine operation.
Rotates a blade at a high speed.
Supports the machine main body.
Intro-7
Spindle axis
θ
-axis
X-axis
Electrical system
section
Function
Front