計測機器 Ashcroft 28HPXのPDF インストールとメンテナンスの説明をオンラインで閲覧またはダウンロードできます。Ashcroft 28HPX 4 ページ。 High purity gauge
ページを印刷する
Installation and Maintenance Instructions for
28HPX High Purity Gauge
28HPX High Purity Gauges
Table of contents:
1. INTRODUCTION ................................................................. 1
2. APPLICATION ..................................................................... 1
3. TRANSPORTATION, STORAGE, UNPACKING
PRECAUTION ...................................................................1-2
4. DRAWING ............................................................................ 2
5. INSTALLATION .................................................................... 2
6. OPERATION ........................................................................ 2
7. MAINTENANCE ................................................................... 2
8. TROUBLESHOOTING ......................................................2-3
1. INTRODUCTION
Pressure measurement is an important aspect of manufac-
turing. Advancement of equipment and plant engineering
technology requires higher performance and more versatile
instrument functions.
The Ashcroft model 28HPX High-Purity pressure gauge is
similar to an ordinary instrument, yet has been assembled
under a significantly different process where treatment,
control, and inspection are rigidly maintained. This manual
describes the basic operation of this product for the semi-
conductor industry while adhering to the following instruc-
tions will ensure its proper and effective application.
[Before Using Pressure Gauge]
It is highly recommended that this instruction manual be
thoroughly reviewed to prevent improper instrument handling
and/or implementation. Consult Ashcroft on related topics
not covered within this document.
[Warranty]
Instruments are repaired or replaced, at no cost, if deter-
mined to be within the 1-year warranty period and non-con-
forming in accordance with defects due to design or manu-
facture by Ashcroft. Please note that the following instances
are excluded.
1. Delivered products are disassembled, altered, parts
replaced, or where any new function is added by the user
or any third party.
© Ashcroft Inc. 2020, 250 East Main Street, Stratford, CT 06614-5145, USA, Tel: 203-378-8281, Fax: 203-385-0357, www.ashcroft.com
All sales subject to standard terms and conditions of sale. 28_HPX_Gauge_im_RevA_(I&M011-10276)_04-03-20
2. Directions described within the instruction manual or cata-
log have not been observed.
3. Non-conformance is caused by deterioration due to use,
natural disaster, fire or other force majeure events.
4. Secondary damage caused by the non-conformance of
the products including the above.
Regardless of recognized mishandling, any apparent evi-
dence of deformation, abrasion, burnout, or other identified
issue shall be excluded from the warranty scope with the
cost being incurred by the customer.
[Definition of Safety Terms]
Safety precautions within this manual have been classified
as follows:
DANGER - Ignoring this warning may result in serious
injury or death.
WARNING - Ignoring this warning may result in serious
injury or death.
CAUTION - Ignoring this warning may result in the material
damage and render instrument performance defective.
2. APPLICATION
This pressure gauge has an electropolished wetted sur-
face for measuring materially-compatible gas pressure (EP
grade). The pressure gauge is fabricated in accordance with
high cleanliness and tightly sealed standards. Consequently,
the model 28HPX High-Purity pressure gauge is ideally
suited for pressure measurement within the semiconductor
production process, etc.
The product footprint design is ultra-compact and incor-
porates a 1.125˝ surface mount. The pressure element is a
diaphragm which facilitates easy maintenance for cleaning
and gas flushing.
The instrument's pressure element is a thin wall diaphragm.
Do not use the pressure gauge with the wetted material
exposed to any corrosive gas or atmosphere. Additionally,
it is industry practice for the gas detector's to be installed
within the same environment; this will provide an alert to
escaping gas that may adversely affect people and/or
equipment
3. TRANSPORTATION, STORAGE, UNPACKING PRECAUTION
3.1 Transportation
Units should be handled the same as electronic or test mea-
surement instruments. Be very careful not to apply vibration
to the pressure gauge during transportation.
Never hit or drop the pressure gauge.
CAUTION
The instrument may incur damage if dropped/impacted.
3.2 Storage
Store in a temperature-controlled environment free from
dust, humidity, and vibration. Prevent temperature variances
as this may result in condensation developing in the product.
1