akrometrix Table Top Shadow Moire 사용자 설명서 - 페이지 10

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3.1

Troubleshooting Data Acquisition

As with any measurement system, the TTSM has its limitations. These limitations
exist because the shadow moiré technique with phase stepping analysis is sensitive to
the optical properties of the samples measured.
The optical and analytical limitations of the system include:
 Failure to obtain good fringe phase information.
 Loss of resolution on samples with a wide range of reflectivity.
 Fine pitch surface patterns.
For further troubleshooting details, please see the Surface Analysis User Manual as
well as the Akrometrix Optical Techniques and Analyses 101 manual.
Page 10 of 14

3 Troubleshooting

40-5000-8100 Rev. A
Table Top Shadow Moiré User Manual