ATTOTECH GR020 Manual - Page 12

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Trouble shooting

A leak observed when the valve is under vacuum, can come from the poppet, the body, or from

the gas tubes and connections in your vacuum chamber. If you have recently opened the body for

service or to adjust the direction of the target the second option is the most likely. If the leak

seems to come from the valve rather than from the tubes and connections in your vacuum

chamber the leak can be located in the following way. Place the valve onto a vacuum chamber

that can be pumped down to 10

outside (see the figure below). KF-40 connectors can be used for this purpose. If the vacuum

goes down as usual after the vacuum pumps have been started the leak comes from the body. In

the opposite case, there is a problem with the poppet and you may proceed to section

The body might leak through the seals of the electrical and gas feed troughs or the O-ring (no. 5)

between the back and front of the valve body. Check if the gas feed-through is mounted

according to the instructions in the "Installation - Gas" section.

If the gas feed through is mounted according to the instructions proceed by opening the valve

body Open the valve body by unscrewing the eight M3 hex screws (no. 3 in the overview

drawing) and pull the back and the front of the valve body apart.

With the valve body open check if the electrical feed through is properly tightened and inspect the

O-ring (no. 5). If necessary, replace it. When closing the body, special care should be taken

not to clamp the electrical wire between the front and the back of the valve body. See point

6 in the "Adjustment of poppet" section below.

Adjustment of the poppet

Adjusting the poppet should be undertaken with great care since this is the most crucial and

fragile part of the valve. The procedure is as follows.

1. Open the valve body by unscrewing the eight M3 hex screws (no. 3 in the overview

drawing) and pull the back and the front of the valve body apart. Pay attention to the

wires still connecting the two parts.

2. Place the front of the body, i.e. the one with the piezo disc on a vacuum chamber, see

the figure below.

-5

mbar, the target being placed inside the chamber and the body

KF 40 tube

+O-rings

Vaccum chamber

Pulsed valve