Olympus Lext OLS3100 Brochure & Specs - Page 10
Browse online or download pdf Brochure & Specs for Microscope Olympus Lext OLS3100. Olympus Lext OLS3100 16 pages. Confocal laser scanning microscope
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World-class resolution and precision.
World's highest level of resolution
The optical system designed exclusively for use with 408-nm
laser light (violet opt system) prevents the occurrence of
aberrations associated with the use of a short-wavelength light
source, and brings the highest performance out of the 408-nm
light source. Such a high level of resolution has been made
possible by the confocal optical system having an optimized
circular pinhole and the high-
speed XY scanner with the
MEMS technology of Olympus.
With the world's highest-level
planar resolution, a line or space
of 0.12 µm can be resolved.
Additionally, the 0.01 µm height
resolution supports the user in
undertaking measurements of
microscopic surface profiles.
Basic concept of the two-dimensional scanner
Scan pattern
Further advanced, the world's highest level of
repeatability
Advanced optical techniques of Olympus accumulated over
years have made possible the planar measurement
repeatability of 3 = 0.02 µm and the height measurement
repeatability of 3 = 0.04 + 0.002L mm (L = measured length
in µm). A guide with high performance in terms of straightness
and a high-precision linear scale are used for Z-axis scanning.
These parts combined with the further advanced CFO search
function contribute to very high level of repeatability. The high
degree of reliability makes it possible for LEXT to meet the
highly demanding needs of diverse fields of research and
industry.
Measurements that can be trusted
Highly reliable data can be provided based on the strict
traceability system that is linked with the JCSS (Japan
Calibration Service System).
0.12 µm line and space 14,400x
MEMS scanner
Incident light
Basic concept of a light path in the violet opt system
CCD
Objective lens
Height
Traceability chart
JCSS Japan Calibration Service System
Stabilized He-Ne Laser
Calibration standard
LEXT (OLS3100)
9
Photomultiplier
Circular confocal
pinhole
Laser
LED light
CFO search function
Multiple points
The original I-Z curve is
at peak
drawn based on the upper,
intensity
high-luminance points, and
maximum luminance values
are calculated with high
accuracy by using an
advanced formula. The high
repeatability of LEXT is
made possible through the
height data being obtained
in this process.
Japan (NMIJ/AIST)
OLYMPUS
Block Gauge
Calibration block