Olympus MX61A Manual - Page 5

Browse online or download pdf Manual for Laboratory Equipment Olympus MX61A. Olympus MX61A 48 pages. Motorized 300 mm compatible semiconductor/fpd inspection microscope

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5. The desktop surface on which the microscope system is installed should be almost horizontal with a tilting angle of less
than 20' with a 300 mm (12-inch) stage or less than 1° with a 200 mm (8-inch) stage (to prevent spontaneous displace-
ment of the stage) and rigid.
(Weight of the microscope system with the basic combination for reflected light observation: 14x12-inch stage combination
— approx. 52 kg, 8x8-inch stage combination — approx. 45 kg)
}Although this microscope is designed with excellent vibration resistance, its maximum performance can be achieved
when an anti-vibration bench is used.)
6. The lamp housing surface at the rear of the microscope frame will become very hot during operation. When installing the
microscope, ensure that there are ample free spaces (of more than 100 mm) around and in particular above and below
the lamp housing. Also, the power cord and other cables should be laid out at distances from the microscope because
contact with them may result in their fusion and an electric shock due to it.
7. To avoid a potential shock hazard, make sure that the power cord is safety grounded/earthed.
8. To allow each microscope manifest its full performance, reserve an installation space having the minimum dimensions
described below before assembly and installation of the microscope. (Sizes in
}The dimensions of the area enclosed in alternate long and two short dashes lines indicate the stage movement range.
The dimensions marked * are variable depending on the lamp housing used.
}When maintenance is required, a larger workspace can be prepared by changing the observation tube orientation or
moving the stage.
}The following installation space is set according to the SEMI standard guidelines (SEMI S8-0705). It is recommended that
you set the optimum installation space for each customer based on the SEMI standard guidelines (SEMI S8-0705).
MX61A installation space: When the 14x12-inch stage is combined
Stage movement
range
MX61A
)
Unit: mm
Installation footprint
MX61A
2