Olympus MX61A Руководство - Страница 17

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Fig. 5

Fig. 6

Fig. 7

Attaching the Holders

# Attach a holder in the orientation so that the notch on the holder's

side faces left. The adjustment of the levelness is performed in this

orientation.

Attaching the Wafer Holder (Fig. 5)

1. Insert the wafer holder plate @ into the stage, one edge first.

2. Push the wafer holder plate from above to make sure that it sits correctly

with no tilt.

3. Using a flat-blade precision screwdriver, clamp the plate by tightening

the holder clamping screw ² on the left side of the stage.

# The levelness of the holder is adjusted by the heights of the three

screws on the back side of the stage. Do not push positions near

the holder, for this may tilt the holder.

Attaching the Mask Holder (Fig. 6)

1. Carefully place the mask holder ³ on the stage surface, making sure

that it sits correctly with no tilt.

2. Using the precision screwdriver, clamp the plate by tightening the holder

clamping screw | on the left side of the stage.

Attaching the Black Plate/Glass Plate

Carefully place the plate on the stage surface, and tighten the holder

clamping screw on the left side of the stage.

# When attaching the glass plate, do not tighten the clamping screw

excessively as the glass plate may break. Tighten to the extent that

the glass plate does not rattle noticeably when attached.

Adjusting the Levelness of Holder Plate (Fig. 7)

The levelness of the stage travel (movement) and the top surface of the

wafer holder have been adjusted at the factory. If finer adjustment is

required or when using a holder from a manufacturer other than Olympus,

apply drops of alcohol on the three adjustment screws ƒ to loosen the

screw lock, then adjust the heights of the screws by inserting a flat-bladed

screwdriver from below.

# The maximum loads of the stages including the holders are as fol-

lows.

MX-SIC8R

MX-SIC1412R2 : 3.5 kg (7.7 lbs)

: 2 kg (4.4 lbs.)

MX61A

(Figs. 5 & 6)