DISCO DFP8140 Teknik Bülten - Sayfa 3

Öğütücü DISCO DFP8140 için çevrimiçi göz atın veya pdf Teknik Bülten indirin. DISCO DFP8140 5 sayfaları. Request for periodic replacement brush/leveling stone (t2 pad washing unit [optional accessory])

Technical Newsletter
Procedures to replace the brush/leveling stone of the T2 pad washing unit (Continued)
Step No.
Press ">P" key twice.
4
・The following screen appears.
Press "MOVE T ESCAPE" key.
5
・The transfer arm 2 pad moves to the chuck table side.
Press "BRUSH SET" key.
6
・The brush will rotate and the brush side will face upward.
Open the grinding section side cover at the Z1 side.
7
Remove the brush after removing the hexagon socket head cap screws (M4 × 2).
8
Install a new brush with the hexagon socket head cap screws (M4 × 2).
9
#tnl2019-0008e-rev1
# 3 / 5
R
#305 T.ARM2 / P.WASH.OPT.2
Z:
###.## mm
MOVE
T SCRUBBING
STONE
SET
WASH SEQ
(STONE)
Hexagon socket head cap screw
Procedure
<P
###.## 
T:
VAC:
MOVE
MOVE
T ESCAPE
T BRUSHING
BRUSH
SET
WASH SEQ
(BRUSH)
Brush
N>
### kPa
Hexagon socket
head cap screw