DigiVac Bullseye Piezo Посібник користувача - Сторінка 6
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Section 4:
Why Piezo?
The Bullseye Precision Gauge Piezo incorporates an isolated Piezo resistive sensor (. A piezo resistive
sensor is effectively a silicon strain gauge. When the pressure is placed upon the silicon, the
resistance of a MEMS measurement resistor changes which can be measured by the sensor
electronics. The sensor itself incorporates a wheatstone bridge that is very sensitive to absolute
pressure levels from 1 Torr = 1 mbar to 775 Torr = 1033 mbar.
Piezo resistive sensors are often referred by their full scale or maximum pressure that they measure.
For example, our 775i sensor has a maximum pressure sensitivity of 775 Torr or 15PSIA. There are
other piezo-resistive types of sensors that are sensitive in other pressure levels. Other pressure levels
that are common with piezo resistive sensors are 30 PSI, 100 PSI, 200 PSI and 1000 PSI.
MEASURE BOTH PRESSURE AND ROUGH VACUUM
Our specialized piezo sensors allow you to easily measure both
Piezoresistive sensors have exceptional durability combined with low cost and better than 1% full scale
accuracy. They are chosen when a combination of durability, cost and accuracy are all important.
The accuracy of a piezo resistive sensors are typically given in % of full scale. For example, a 100 PSI
piezo sensor that is 1% accurate would have an accuracy of ± 0.01 * 100 PSI or ± 1 PSI. Note this
makes the % of reading accuracy very good near its full range of 100 PSI, but not so good near its base
pressure (lowest detectable pressure) of 1 PSI. The 775i sensor has an accuracy of ± 2 Torr, or 0.25%
of full scale. This would make its accuracy at 10 Torr ± 2/10 or ± 20% of reading at an actual pressure
of 10 Torr and at 200 Torr, ± 2/200 or 1% of reading.
TWO SENSOR OPTIONS FOR VERSATILITY
Choose from two different sensors based on your specific needs
Sensor Specifications
Sensor Method
Sensor Protection
Full Range
Most Accurate Range
Accuracy
Target Application
BPG Piezo 775i
Direct
Isolated
0.5 - 775 Torr
2-775 Torr
+/- 2 Torr
Rotary Evaporation, Falling Film
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Copyright 2020, DigiVac, Inc., All rights reserved.
BPG Piezo Vac2PSI
Direct
Isolated
20 Torr - 85 PSIG
50 Torr - 85PSI
+/- 15 Torr +/- 0.5 PSI
Rotary Evaporation, Extraction
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