- ページ 6
インバーター Advanced Energy Industries RFX 600のPDF ユーザーマニュアルをオンラインで閲覧またはダウンロードできます。Advanced Energy Industries RFX 600 20 ページ。 Advanced energy generator
ページを印刷する
2. GENERAL DESCRIPTION
The RFX 600
is a
two-stage power generator using a
Fetpower™
modular power amplifier and a switchmode dc power supply for main
power and control.
The RFX is designed for 80% reflected power
capability. It regulates output power using either forward power or
dc bias of the load.
Its features allow it to be used alone or in combination with other
supplies (through common exciter mode) in such configurations as RF
with RF bias, RF with dc bias, and dc with RF bias.
3. SPCIFICATIONS
Power Output:
600 watts maximum into a 50 ohm load.
Harmonic Distortion:
All harmonics are more than 50dB below the
fundamental.
Noise,
hum and ripple are down by 30dB or greater
below the fundamental.
Freguency:
13.56MHz
±
0.005%
Output Impedance:
50 ohms
output Power Regulation:
variation
from
1: 1
to
limits).
±
3% of power setting for any load VSWR
10: 1
resistive
(wi thin auto protection
Load Mismatch Tolerance:
mismatch without failure.
continuous
operation
into any
load
Pulsed Operation:
Frequency range from zero to 10KHz maximum.
Rise and fall times are less than 2.0 microseconds.
PUlsing input
is CMOS
15V compatible.
Unit is capable of simultaneous and
independent RF amplitude control and pulse operation.
Protection:
Automatic foldback occurs when voltage, current or
dissipation exceeds preset limits.
Unit capable of up to 400 watts
reflected power mismatch without foldback.
Unit is completely
protected from hardware damage due to open outputs.
RF Power Control:
0 to 600 watts with front panel control or
remote 0 to 5 volt command.
Maximum Power Limit:
Adjustable limit from zero to maximum output
prevents excessive output during remote operation.
Front panel
setscrew adj ustment.
setting may be observed on front panel
digital display.
Automatic Forward Power Setting:
externally controlled.
o
to 600 watts internally or
7