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CX21 MAINTENANCE MANUAL

2-4 Final adjustment

(A)

(B)

A001

< Fig. 2 >

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Image backlash adjustment:

1) Under observation state (with 100X objec-

tive), move the stage to the desired image

position by turning the Y-knob (A).

At that stop position, check image backlash.

If it is over 2 microns, conduct the following

adjustment.

2) When adjusting the Y-movement, loosen the

two screws (*1) and turn the Y-knob (A) to

bring backlash within 2 microns.

* After turning the knob and temporarily

tighten the screws, check image backlash in

the observation state. Repeat the

adjustment until image backlash is within the

standard.

Screws: AWU3X4SA (*1) 2pcs.

3) For the X-movement, adjust image backlash

by turning the X-knob (B) and check it in the

same manner as the Y-knob.

Screws: AWU3X4SA (*2) 2pcs.

* The tension of X/Y knob becomes heavy or light

by turning the knob as following direction.

<Fig.2>

X-knob (B)

Y-knob (A)

- 16 -

REPAIR PROCEDURE

clockwise

counterclockwise

light

heavy

light