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CX21 MAINTENANCE MANUAL

2. Mechanical Adjustment

If a specimen image is moved when the stage is brought into the desired position of

specimen, it is necessary to adjust the wire tension of stage.

Take off the mechanical stage (A) from the plane stage (B)

by removing the two screws (*1).

(A)

Remove the specimen holder (C) from the

inner guide (D).

Screw: 3PSK2X4SA (*2), 3pcs.

X-wire

* For the tension adjustment of X-wire,

refer to next page.

(B)

(a)

(C)

(B)

arrow view (a): bottom

*1: Fixing screws of mechanical stage

Screw: AB3X10SA (*1), 2 pcs.

Remove the Y-cover (E).

Screw: CUTB3X8SA (*3), 3pcs.

Y-wire

(D)

(E)

* For the tension adjustment of Y-wire,

refer to next page.

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REPAIR PROCEDURE

(A)