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顕微鏡 Olympus MX61LのPDF 組立マニュアルをオンラインで閲覧またはダウンロードできます。Olympus MX61L 49 ページ。 200mm/300mm compatible semiconductor/fpd inspection microscopes

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Error Code List

The following table lists the error codes, their causes and remedies.

If the error recurs after applying the remedies described below, contact Olympus.

Error

Code

E01120

Command

E01130

Revolving nosepiece

Aperture iris diaphragm

E01150

Command

E01511

Command

E11214

Revolving nosepiece

E11218

Revolving nosepiece

E11271

Aperture iris diaphragm

E11272

Aperture iris diaphragm

E11278

Aperture iris diaphragm

Position

Phenomenon

Parameter error

Not connected error

Negative

acknowledgement

to a query

command

System Busy

Time-out error

Abnormality error

Origin error

Abnormality error

Cause

The input string is errone-

ous.

Nosepiece connection fail-

ure.

The nosepiece is not con-

nected.

The connected nosepiece

is not the designated

model.

Cable wire disconnection.

A string was sent after a

query command.

The 1LOG IN command

was sent in the middle of

operation of a motorized

module.

The operation was not

completed in the specified

period of time.

Irrecoverable error.

Aperture iris diaphragm ini-

tialization after power ON

has not completed.

Irrecoverable error.

Remedy

Check the string used in the

transmitted command.

Check the nosepiece connec-

tion.

Connect the nosepiece.

Connect the designated nose-

piece.

Contact Olympus.

Re-check the command to be

sent.

The 1LOG IN command cannot

be issued while a motorized

module is being driven.

Issue the 1LOG IN command af-

ter the drive of the motorized

module has completed.

Revolving nosepiece: Check if

there is an obstacle for move-

ment.

Contact Olympus.

Switch on the power again.

Contact Olympus.