ATTOTECH GR020 매뉴얼 - 페이지 15
{카테고리_이름} ATTOTECH GR020에 대한 매뉴얼을 온라인으로 검색하거나 PDF를 다운로드하세요. ATTOTECH GR020 16 페이지. Piezo driven pulsed valve
페이지 인쇄Specifications
Dimensions
Dimensions
Valve body (ØxD)
Target (WxDxL)
O-rings (inside diameter x width)
Body sealing
Poppet
Target
Connectors
Input gas connector
High Voltage connector
Cooling connections
Input / Output specifications
External input voltage range
Electrical capacitance
Electrical Power
Repetition rate
Electrical opening time
Heat removal power
Operating temperature
Gas backing pressure
Performance
Physical opening time
Backing pressure
(bars)
Opening
voltage
(V)
Settings for the tests: 1 kHz repetition rate, 150μs opening time.
The opening time is estimated from how much the valve trigger must be temporally detuned
from a laser pulse to completely cancel the high harmonic yield from the laser-gas-interaction.
73 mm x 26 mm
6 mm x 10 mm x 36 mm
54 mm x 2 mm
0.72 mm x 1 mm
2 mm x 1 mm or 2 mm x 0.8 mm
6 mm positionable Swagelok elbow, SS-6MO-2-2PR
Lemo
6 mm Swagelok elbows, SS-6MO-9
0 to -350 V
65nF
50 W
0-1 kHz
120μs to 500μs
2 W (4-5 L/min of water)
15°C ± 10°C
0 to 5 bar
down to 30μs
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