ATTOTECH GR020 Manuel - Sayfa 15
Kontrol Ünitesi ATTOTECH GR020 için çevrimiçi göz atın veya pdf Manuel indirin. ATTOTECH GR020 16 sayfaları. Piezo driven pulsed valve
Sayfayı YazdırSpecifications
Dimensions
Dimensions
Valve body (ØxD)
Target (WxDxL)
O-rings (inside diameter x width)
Body sealing
Poppet
Target
Connectors
Input gas connector
High Voltage connector
Cooling connections
Input / Output specifications
External input voltage range
Electrical capacitance
Electrical Power
Repetition rate
Electrical opening time
Heat removal power
Operating temperature
Gas backing pressure
Performance
Physical opening time
Backing pressure
(bars)
Opening
voltage
(V)
Settings for the tests: 1 kHz repetition rate, 150μs opening time.
The opening time is estimated from how much the valve trigger must be temporally detuned
from a laser pulse to completely cancel the high harmonic yield from the laser-gas-interaction.
73 mm x 26 mm
6 mm x 10 mm x 36 mm
54 mm x 2 mm
0.72 mm x 1 mm
2 mm x 1 mm or 2 mm x 0.8 mm
6 mm positionable Swagelok elbow, SS-6MO-2-2PR
Lemo
6 mm Swagelok elbows, SS-6MO-9
0 to -350 V
65nF
50 W
0-1 kHz
120μs to 500μs
2 W (4-5 L/min of water)
15°C ± 10°C
0 to 5 bar
down to 30μs
15