Advanced Energy Industries RFX 600 User Manual - Page 12
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A two-wire on command is possible with ON.D and OFF/RESET.D
connected together.
To accomplish this both must be
connected to power common (User Pin 19) simultaneously to
turn the RFX drive on.
pin 5. PULSE ON.A
This digital input enables the user to pulse the 13.56MHz
output at rates up to 10KHz and duty cycles from 0-100%.
To pulse the output off, a digital low must be provided at
this control pin.
To pulse the output on, a +15 volts signal
must be provided at this control pin.
pin 6. CEX TOGGLE.D
The digital common exciter toggle command enables the CEX in
port, on the rear of the RFX supply.
This command
simultaneously disables the exciter within this power supply
allowing for a common exciter signal to drive both supplies
in synchronization through the CEX port.
(Refer to the
section pin 16, DC BIAS.A on page 15).
pin 7. PHASE ANGLE. A
Analog phase angle is an input representing the phase angle
between the output voltage and current.
This is a zero to 0-
5 volt signal indicating 0-90 degrees.
pin 8. PHASE.D (+)
(-)
Digital phase (+)
(-) is an input representing the sign of
the phase angle between the output voltage and current.
A
digital low indicates a voltage lag of a capacitive load.
pin
9. PLASMA. D
The digital plasma signal is an input from the ATX tuner
indicating that the ATX tuner has sensed the presents of a
plasma in the chamber.
pin
10. LOAD POWER
IN.A
The analog load power signal is an input representing load
power. This analog signal is scaled such that 0-5 volts
equals 0 to full power rating.
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