Advanced Energy Industries RFX 600 User Manual - Page 14
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pin 16. DC BIAS.A
The analog dc bias signal is a scaled output signal
representing chamber dc bias as measured by the ATX or the
voltage divider/filter network (See the DC Bias Regulation
section on page 18.)
When properly calibrated, 0-5 volts
equals 0-1000 volts dc bias.
pin 17. FORWARD POWER.A
The analog forward power signal is a scaled output signal
representing forward power, as measured by the RFX.
The
scaling factor is: 0-5 volts represents 0 to 600 W of the
RFX.
pin 18. SIGNAL COMMON
The signal common (ground) is a dedicated common for all user
connector analog input and output signals.
pin 19. POWER COMMON
The power common (ground) is a dedicated common for all user
connector digital and control input and output signals.
pin 20. TUNER OK.D
The digital tuner OK signal is an input from the ATX Tuner
indicating satisfactory tuner operation.
The signal is an
active digital high.
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