ATTOTECH GR020 Manual - Page 6

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Technical description

An overview drawing of the GR020 can be found below. In the later sections of the manual
references will be given to the numbering and names in this drawing.
1
3
1. Body - front piece
2. Body - back piece
3. M3 hex screw
4. Cooling tube
5. Body O-ring
6. Target
7. M3 hex screw
8. Guiding pin
9. Target O-ring
16
10
15
14
2
7
6
9
8
12
11
13
10. M2.5 slotted screw
11. Piezo electric disc (PZD)
12. Clamping screw
13. Clamping nut
14. Locking nut
15. Poppet
16. Poppet O-ring
17. Cooling clamp
18. Countersunk M3 hex screw
6
18
4
17
5