ATTOTECH GR020 매뉴얼 - 페이지 6
{카테고리_이름} ATTOTECH GR020에 대한 매뉴얼을 온라인으로 검색하거나 PDF를 다운로드하세요. ATTOTECH GR020 16 페이지. Piezo driven pulsed valve
Technical description
An overview drawing of the GR020 can be found below. In the later sections of the manual
references will be given to the numbering and names in this drawing.
1
3
1. Body - front piece
2. Body - back piece
3. M3 hex screw
4. Cooling tube
5. Body O-ring
6. Target
7. M3 hex screw
8. Guiding pin
9. Target O-ring
16
10
15
14
2
7
6
9
8
12
11
13
10. M2.5 slotted screw
11. Piezo electric disc (PZD)
12. Clamping screw
13. Clamping nut
14. Locking nut
15. Poppet
16. Poppet O-ring
17. Cooling clamp
18. Countersunk M3 hex screw
6
18
4
17
5