ATTOTECH GR020 매뉴얼 - 페이지 5

{카테고리_이름} ATTOTECH GR020에 대한 매뉴얼을 온라인으로 검색하거나 PDF를 다운로드하세요. ATTOTECH GR020 16 페이지. Piezo driven pulsed valve

Introduction

The GR020 pulse valve is designed to precisely inject gas in a vacuum chamber. Both the timing

and the amount of gas released can be finely tuned.

- High Order Harmonic generation

- Attophysics

- Molecular alignment

- Cluster science

- Electron spectrometers

- Gas phase spectroscopy

The pulse valve is driven by a piezo electric disc (PZD) on which a small poppet is tightened. It

opens and closes a 1 mm diameter hole where thhe gas flows. The moving parts are kept as light



as possible, which makes opening times as short as 30μs feasible.

The PZD and the poppet are

mounted inside the valve body where backing pressures up to 5 bars can be applied. The valve

opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through

the body. The amount of gas is controlled by the voltage applied to the PZD. At the end of this

pipe the target is tightened to the body by two screws. The target is decoupled from the moving

parts; this makes the switch between targets very easy, and allows for custom-made target

designs. The valve can is driven by a voltage gate produced by our piezo valve drive unit,

together with a delay generator, or other pulsed high voltage power supplies. A 120μs electrical

gate corresponds to a mechanical opening time down to 30μs.*

The body of the valve is cooled by a water cooling circuit.



The opening time is estimated from how much the valve-trigger must be temporally detuned

from a laser pulse to completely cancel the high harmonic yield from the laser-gas-interaction.