ATTOTECH GR020 매뉴얼 - 페이지 4
{카테고리_이름} ATTOTECH GR020에 대한 매뉴얼을 온라인으로 검색하거나 PDF를 다운로드하세요. ATTOTECH GR020 16 페이지. Piezo driven pulsed valve
페이지 인쇄Content
Introduction ...................................................................................................................................5
Applications: .............................................................................................................................5
Principle of operation ...............................................................................................................5
Technical description ...............................................................................................................6
Installation ....................................................................................................................................7
Mechanical mounting ...............................................................................................................7
Cooling .....................................................................................................................................7
Gas ...........................................................................................................................................8
Electrical connections ..............................................................................................................8
Connection of the Attotech amplifier (option) ...........................................................................9
Operation ....................................................................................................................................10
Turning on-off procedure .......................................................................................................10
Turning on-off procedure with the Attotech Driver (Option) ...................................................10
Settings ..................................................................................................................................11
Target change ........................................................................................................................11
Piezo instructions ...................................................................................................................11
Trouble shooting .........................................................................................................................12
Gas leak diagnosis .................................................................................................................12
Attending a leak from the body ..............................................................................................12
Adjustment of the poppet .......................................................................................................12
Electrical problems .................................................................................................................14
Specifications .............................................................................................................................15
Dimensions ............................................................................................................................15
Connectors .............................................................................................................................15
Input / Output specifications ...................................................................................................15
Performance...........................................................................................................................15
Limited warranty .........................................................................................................................16
Return procedure ...................................................................................................................16
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