ATTOTECH GR020 매뉴얼 - 페이지 7

{카테고리_이름} ATTOTECH GR020에 대한 매뉴얼을 온라인으로 검색하거나 PDF를 다운로드하세요. ATTOTECH GR020 16 페이지. Piezo driven pulsed valve

Installation

Mechanical mounting

Front
Back
Four M6-threaded holes in the body-back are intended for mounting the pulsed valve. The
mounting holes are placed in the corners of a 25 mm side square to fit most translation stages.
The two parts of the body and the position of the cooling hoses can be changed following the
procedure given at the end of next section ("cooling" section). Overall dimensions are given in the
specifications section.

Cooling

ø
90° Swagelok™ elbows are mounted on the
6 mm copper tube ends of the cooling circuit.
References for these fittings can be found in the specifications section of the manual. Instructions
on how to mount tube fittings can be downloaded from the Swagelok homepage,
"An Installer's Pocket Guide for Swagelok Tube Fittings (MS-13-151, R3)" page 10
http://www.swagelok.com/downloads/webcatalogs/EN/MS-13-151.PDF
Be aware not to over tighten the tube fittings: one and a quarter of a turn is enough.
The heat removal power of the chiller attached to the internal cooling circuit must be at least 2 W.
A flow of 4-5 l/min of 15°C tap water provides sufficient cooling.
The piezo electric disc must be operated above -40°C. Operating above 25°C has not been
tested, do not exceed this temperature as it might result in damage of the piezo disc and the
moving parts. Recommended operating temperature is 15°C±10°C. Note that the parts have been
fit together at 20°C. Any significant departure from this temperature might require some
readjustments of the moving parts.
The position of the tube ends with Swagelok fittings can be adjusted by loosening the screws
(overview drawing #18) holding the cooling clamps (#17).
Remount the cooling clamps when the position of the fittings is correct. Pay attention to centre the
cooling clamps on top of the threaded holes to prevent damaged threads. A mini quick clamp can
be used to push the cooling clamps towards the curved surface, i.e. towards the gas exit hole.
When you have found the right position a small torque is sufficient to tighten the screws.
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