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4-2 When Using IX83

4-3 When Touch Panel Controller is not available

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CAUTION

Fig. 7

CAUTION

Fig. 8

CAUTION

Fig. 9

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When using IX83, the auto compensation of the stage can be performed

from the touch panel controller.

Before starting the auto compensation, install the stage on the

IX83 and make sure nothing, including a specimen, is placed

on the stage.

1. Open the [Menu] display by controlling the touch panel.

2. Tap the System Setting button @ to open the [System Setting] display.

3. Tap the [System] tab 2 and then tap the Auto Compensation

button 3.

4. When the auto compensation confirmation display appears, tap [OK] to

start auto compensation.

The stage moves automatically during the auto compensation

(for a few minutes). Do not touch the stage during the movement.

5. When auto compensation completes, the touch panel screen shows the

completion message.

If the foreign substance is entered in the stage driving part,

the status may not be recovered by performing the Auto

Compensation. In this case, turn the power of BX3-SSU Control

Box to "

" (OFF), and perform the Auto Compensation again

after moving the stage from front to back and from side to side

several times with a hand.

1. Set the power of the control box for the scanning stage with ultrasonic

to "

" (OFF).

2. Move the stage to the origin position with hands.

Horizontal direction: Align the edge on the upper level to the middle level

of the stage.

Vertcal direction: Align the guide part 1 placed at the bottom of the middle

level of the stage to the edge of the front side of the lower level.

3. Set the power of the control box for the scanning stage with ultrasonic

to " I " (ON).

If the power of the control box for the scanning stage with

ultrasonic is set to " I " (ON) while the stage is not placed at the

origin position, the origin position is misrecognized to limit the

stage movement range.

BX3-SSU