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Advanced Energy Industries RFX 600 ユーザーマニュアル
Signal Descriptions: User
1/0
Pins
pin 1. dc BIAS.A +
The analog dc Bias
(+)
connection is the positive input to a
differential operational amplifier for scaled feedback from
the chamber.
To use this input, a voltage divider of
200:1
should be established across the chamber electrodes.
This
ratio will provide 5 volts dc feedback at
1000
volts dc
chamber bias.
The maximum working voltage of the connection
is
10
volts above ground.
The more positive of the two
feedback leads should be connected at this pin.
pin 2. DC BIAS.A (-)
The analog dc Bias (-) connection is the negative input to a
differential operation amplifier for scaled feedback from the
chamber.
To use this input a voltage divider of
200:1
should
be established across the chamber electrodes.
This ratio
will provide 5 volts de feedback at
1000
volts dc chamber
bias.
The maximum working voltage of the connection is
10
volts below ground.
The less positive of the two feedback
leads should be connected at this pin.
pin 3. OFF/RESET.D
The remote digital OFF/RESET command duplicates the RF off of
the front panel.
This function overrides all other commands
and forces the RFX drive to turn off, opens the main
contactor and resets the interlock.
A continuous digital low
command (contact closure to power common, user Pin 19) is
required to override the off command.
The internal circuit
has a 15 volt pull-up on it to provide the OFF command when
contact closure to Pin 19 is interrupted.
The user connector plug shipped with a new RFX power supply
has a jumper wire installed between OFF/RESET.D and power
common.
This will override the OFF command when this plug is
installed.
pin 4. ON.D
The remote digital on command duplicates the RF on function
of the front panel, when remote control has been selected at
the front panel.
A momentary contact closure of D. on to
power common (User Pin 19) will cause RFX drive to turn on if
OFF/RESET.D has been overridden.
(See pin 3, OFF/RESET.D.)
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