Olympus MX61L 조립 설명서 - 페이지 49

{카테고리_이름} Olympus MX61L에 대한 조립 설명서을 온라인으로 검색하거나 PDF를 다운로드하세요. Olympus MX61L 49 페이지. 200mm/300mm compatible semiconductor/fpd inspection microscopes

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Olympus MX61L 조립 설명서

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Table of Contents

Table Of Contents3

Safety Precautions4

Mx61L Installation Space5

Mx61 Installation Space6

Mx61L External View, Eye Point And Center Of Gravity6

Mx61 External View, Eye Point And Center Of Gravity7

Safety Symbols8

Caution Indications8

Maintenance And Storage9

Applicable Standards9

Stage And Holder System For The Mx6112

Stage And Holder System For The Mx61L13

Assembly Diagram14

Detailed Assembly Procedures15

Attaching The Stage15

Attaching The Y-Stroke Limit Stopper15

Caution Before Transporting The Stage15

Attaching The Holders16

Attaching The Wafer Holder16

Attaching The Mask Holder16

Attaching The Black Plate/Glass Plate16

Attaching The Objectives17

Using The Brightfield Objective Adapter17

Attaching The Motorized Revolving Nosepiece17

Attaching The Observation Tube17

Attaching The Eyepieces18

Attaching The Halogen Bulb18

Attaching The Lamp Housing19

Attaching The Mercury Burner19

Resetting The Burner Hour Counter20

Mercury Burner Replacement20

Setting Up The Power Supply Unit For Mercury Burner21

Attaching The High-Intensity Light Source Lamp Housing21

Connecting The Hand Switch (U-Hstr2)21

Attaching The Breath Shield22

Connecting The Power Cord22

Fuse Replacement22

Applicable Fuses22

Setting The Dip Switches And Preset Switches23

As (Aperture Stop) Preset Switch Setting24

Setting The As Values24

As Interlocking24

When Using The U-Hstr2 Hand Switch:24

Centering The Reflected Light Aperture Iris Diaphragm25

Modules Installed By Olympus26

Transmitted Light Module (Mx-Tilla/Tillb)26

(Optional) Light Path Setup27

Reflected Neutral Density Filter (Nd 0.5)27

Centration Of The Mercury/Xenon Burner28

Turning The Burner On28

Centering The Mercury Burner28

Precise Centering Of The Mirror29

Microscope Control From Computer30

Rs-232C Communication Parameters30

Connection Of The Rs-232C Cable30

Connection Of Connectors And Pin Assign30

Communication Specifications31

Command And Response31

Request Commands And Query Commands31

Remote Mode And Local Mode31

Command Sequences32

During Initialization Of The Mx61/61L32

Command Details34

Special Notes34

Objective Switching35

Command Descriptions35

Aperture Iris Switching36

Objective/Aperture Iris Switching37

Cube Status Check38

Unit Presence38

Glare Prevention Setting39

Error Code List40

External Control Of Revolving Nosepiece41

Connector Used41

Pin Layout And Signal Names41

Control Specifications41

Revolving Nosepiece Position Numbers (Index Nos. On The Center Of Revolving Nosepiece)41

Maintenance Part Lists42

Light Source Bulbs/Burners42

Immersion Oil42

Proper Selection Of The Power Supply Cord43

Specifications43

Certified Cord43

Har Flexible Cord44

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